Optimized measurement of strained Si thickness and SiGe virtual substrate composition by spectroscopic ellipsometry
| Autor: | Vineis, C.J., Erdtmann, M., Leitz, C.W. |
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| Zdroj: | In Thin Solid Films 2006 513(1):78-83 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Vineis, C.J., Erdtmann, M., Leitz, C.W. |
|---|---|
| Zdroj: | In Thin Solid Films 2006 513(1):78-83 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect