The low temperature synthesis of Al doped ZnO films on glass and polymer using pulsed co-magnetron sputtering: H2 effect
Autor: | Chung, Yun M., Moon, Chang S., Jung, Woo S., Han, Jeon G. |
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Zdroj: | In Thin Solid Films 2006 515(2):567-570 |
Databáze: | ScienceDirect |
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