The role of plasma induced substrate heating during high rate deposition of microcrystalline silicon solar cells
| Autor: | van den Donker, M.N., Schmitz, R., Appenzeller, W., Rech, B., Kessels, W.M.M., van de Sanden, M.C.M. |
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| Zdroj: | In Thin Solid Films 2006 511:562-566 |
| Databáze: | ScienceDirect |
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