Correlation of optical and photoluminescence properties in amorphous SiN x:H thin films deposited by PECVD or UVCVD
| Autor: | Lelièvre, J.-F., De la Torre, J., Kaminski, A., Bremond, G., Lemiti, M., El Bouayadi, Rachid, Araujo, Daniel, Epicier, Thierry, Monna, R., Pirot, M., Ribeyron, P.-J., Jaussaud, C. |
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| Zdroj: | In Thin Solid Films 2006 511:103-107 |
| Databáze: | ScienceDirect |
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