Electrical properties of B-doped polycrystalline silicon thin films prepared by rapid thermal chemical vapour deposition
| Autor: | Ai, Bin, Shen, Hui, Liang, Zongcun, Chen, Zhi, Kong, Guanglin, Liao, Xianbo |
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| Zdroj: | In Thin Solid Films 21 February 2006 497(1-2):157-162 |
| Databáze: | ScienceDirect |
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