Influence of the sputtering system's vacuum level on the properties of indium tin oxide films
Autor: | Zebaze Kana, M.G., Centurioni, E., Iencinella, D., Summonte, C. |
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Zdroj: | In Thin Solid Films 2006 500(1):203-208 |
Databáze: | ScienceDirect |
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