Local strain in SiGe/Si heterostructures analyzed by X-ray microdiffraction
| Autor: | Mochizuki, Shogo, Sakai, Akira, Taoka, Noriyuki, Nakatsuka, Osamu, Takeda, Shingo, Kimura, Shigeru, Ogawa, Masaki, Zaima, Shigeaki |
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| Zdroj: | In Thin Solid Films 2006 508(1):128-131 |
| Databáze: | ScienceDirect |
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