Suppression of atomic exchange between Ge and Si during germane adsorption on Si(001) using atomically flat surface
| Autor: | Narita, Yuzuru, Murata, Takeshi, Suemitsu, Maki |
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| Zdroj: | In Thin Solid Films 2006 508(1):166-168 |
| Databáze: | ScienceDirect |
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