A fast solution method for the Poisson equation in simulating the direct current and radio frequency discharges
| Autor: | Nanbu, Kenichi, Tong, Lizhu |
|---|---|
| Zdroj: | In Thin Solid Films 2006 506:734-737 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Nanbu, Kenichi, Tong, Lizhu |
|---|---|
| Zdroj: | In Thin Solid Films 2006 506:734-737 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect