Plasma-assisted pulsed laser deposition of carbon films: Effect of oxygen plasma on amorphous carbon film etching
| Autor: | Itoh, M., Suda, Y., Bratescu, M.A., Sakai, Y. |
|---|---|
| Zdroj: | In Thin Solid Films 2006 506:96-100 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
| Autor: | Itoh, M., Suda, Y., Bratescu, M.A., Sakai, Y. |
|---|---|
| Zdroj: | In Thin Solid Films 2006 506:96-100 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect