Structural, optical and mechanical properties of aluminium nitride films prepared by reactive DC magnetron sputtering
| Autor: | Venkataraj, S., Severin, D., Drese, R., Koerfer, F., Wuttig, M. |
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| Zdroj: | In Thin Solid Films 2006 502(1):235-239 |
| Databáze: | ScienceDirect |
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