Towards understanding the superior properties of transition metal oxynitrides prepared by reactive DC magnetron sputtering

Autor: Venkataraj, S., Severin, D., Mohamed, S.H., Ngaruiya, J., Kappertz, O., Wuttig, M.
Zdroj: In Thin Solid Films 2006 502(1):228-234
Databáze: ScienceDirect