Effects of deposition and annealing atmospheres on phase transition of tungsten oxide films grown by ultra-high-vacuum reactive sputtering
| Autor: | Ghen, G.S., Liao, W.L., Chen, S.T., Su, W.C., Lin, C.K. |
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| Zdroj: | In Thin Solid Films 22 December 2005 493(1-2):301-306 |
| Databáze: | ScienceDirect |
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