Deposition of Cu thin films from supercritical carbon dioxide using hexafluoroacetylacetnatecopper
| Autor: | Kondoh, E., Shigama, K. |
|---|---|
| Zdroj: | In Thin Solid Films 2005 491(1):228-234 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Kondoh, E., Shigama, K. |
|---|---|
| Zdroj: | In Thin Solid Films 2005 491(1):228-234 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect