Ion assisted deposition of titanium chromium nitride
| Autor: | Vishnyakov, V.M., Bachurin, V.I., Minnebaev, K.F., Valizadeh, R., Teer, D.G., Colligon, J.S., Vishnyakov, V.V., Yurasova, V.E. |
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| Zdroj: | In Thin Solid Films 21 February 2006 497(1-2):189-195 |
| Databáze: | ScienceDirect |
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