Spectroscopic ellipsometry and reflectometry from gratings (Scatterometry) for critical dimension measurement and in situ, real-time process monitoring
| Autor: | Huang, Hsu-Ting, Terry Jr, Fred L. * |
|---|---|
| Zdroj: | In Thin Solid Films 2004 455:828-836 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect