Residual stress and thermal stress observation in thin copper films
| Autor: | Hanabusa, Takao a, *, Kusaka, Kazuya a, Sakata, Osami b |
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| Zdroj: | In Thin Solid Films 2004 459(1):245-248 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Hanabusa, Takao a, *, Kusaka, Kazuya a, Sakata, Osami b |
|---|---|
| Zdroj: | In Thin Solid Films 2004 459(1):245-248 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect