New design of a spectroscopic ellipsometer by using a spectrometer with multiple gratings and a two-dimensional CCD array detector
| Autor: | You, Hai-Yang, Jia, Jian-Hu, Chen, Jian-Ke, Han, Tao, Ni, Wei-Ming, Wang, Song-You, Li, Jin, Zhang, Rong-Jun, Yang, Yue-Mei, Chen, Liang-Yao *, Lynch, David W. |
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| Zdroj: | In Thin Solid Films 2004 455:84-89 |
| Databáze: | ScienceDirect |
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