Coherent and incoherent interference modelling and measurement of anisotropic multilayer stacks using conventional ellipsometry
| Autor: | Touir, H. *, Stchakovsky, M., Ossikovski, R., Warenghem, M. |
|---|---|
| Zdroj: | In Thin Solid Films 2004 455:628-631 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect