Thin molybdenum oxide films produced by molybdenum pentacarbonyl 1-methylbutylisonitrile with plasma-assisted chemical vapor deposition
| Autor: | Hamelmann, F. *, Brechling, A., Aschentrup, A., Heinzmann, U., Jutzi, P., Sandrock, J., Siemeling, U., Ivanova, T., Szekeres, A., Gesheva, K. |
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| Zdroj: | In Thin Solid Films 2004 446(2):167-171 |
| Databáze: | ScienceDirect |
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