Atmospheric RF plasma effects on the film adhesion property
| Autor: | Chung, Yun M. *, Jung, Min J., Han, Jeon G., Lee, Min W., Kim, Yong M. |
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| Zdroj: | In Thin Solid Films 2004 447:354-358 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Chung, Yun M. *, Jung, Min J., Han, Jeon G., Lee, Min W., Kim, Yong M. |
|---|---|
| Zdroj: | In Thin Solid Films 2004 447:354-358 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect