Influence of Si(1 0 0) surface pretreatment on the morphology of TiO 2 films grown by atomic layer deposition
| Autor: | Finnie, K.S. *, Triani, G., Short, K.T., Mitchell, D.R.G., Attard, D.J., Bartlett, J.R., Barbé, C.J. |
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| Zdroj: | In Thin Solid Films 2003 440(1):109-116 |
| Databáze: | ScienceDirect |
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