Roughness evolution of ZrO 2 thin films grown by reactive ion beam sputtering
| Autor: | Qi, H.J. *, Huang, L.H., Tang, Z.S., Cheng, C.F., Shao, J.D., Fan, Z.X. |
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| Zdroj: | In Thin Solid Films 2003 444(1):146-152 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Qi, H.J. *, Huang, L.H., Tang, Z.S., Cheng, C.F., Shao, J.D., Fan, Z.X. |
|---|---|
| Zdroj: | In Thin Solid Films 2003 444(1):146-152 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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