The effect of RF power on the deposition behavior of anatase clusters
Autor: | Barnes, Mark C. *, Gerson, Andrea R., Kumar, Sunil, Hwang, Nong-Moon |
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Zdroj: | In Thin Solid Films 2003 436(2):181-185 |
Databáze: | ScienceDirect |
Externí odkaz: |
Autor: | Barnes, Mark C. *, Gerson, Andrea R., Kumar, Sunil, Hwang, Nong-Moon |
---|---|
Zdroj: | In Thin Solid Films 2003 436(2):181-185 |
Databáze: | ScienceDirect |
Externí odkaz: |