Conformal deposition of Ti-C:H coatings over high-aspect-ratio micro-scale structures and tribological characteristics
| Autor: | Cao, D.M., Meng, W.J. *, Simko, S.J., Doll, G.L., Wang, T., Kelly, K.W. |
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| Zdroj: | In Thin Solid Films 2003 429(1):46-54 |
| Databáze: | ScienceDirect |
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