Hot-wire chemical vapor deposition for epitaxial silicon growth on large-grained polycrystalline silicon templates
| Autor: | Mason, M.S. *, Chen, C.M., Atwater, H.A. |
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| Zdroj: | In Thin Solid Films 2003 430(1):54-57 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Mason, M.S. *, Chen, C.M., Atwater, H.A. |
|---|---|
| Zdroj: | In Thin Solid Films 2003 430(1):54-57 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect