Catalytic CVD growth and properties of a-C:H and a-C:N
| Autor: | Nakayama, H. *, Takatsuji, K., Moriwaki, S., Murakami, K., Mizoguchi, K., Nakayama, M., Miura, Y. |
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| Zdroj: | In Thin Solid Films 2003 430(1):309-312 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Nakayama, H. *, Takatsuji, K., Moriwaki, S., Murakami, K., Mizoguchi, K., Nakayama, M., Miura, Y. |
|---|---|
| Zdroj: | In Thin Solid Films 2003 430(1):309-312 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect