In situ measurements of sensor film dynamics by spectroscopic ellipsometry. Demonstration of back-side measurements and the etching of indium tin oxide
| Autor: | Zudans, I, Seliskar, C.J *, Heineman, W.R |
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| Zdroj: | In Thin Solid Films 2003 426(1):238-245 |
| Databáze: | ScienceDirect |
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