Advanced excimer-laser crystallization process for single-crystalline thin film transistors
| Autor: | Ishihara, Ryoichi *, van der Wilt, Paul Ch., van Dijk, Barry D., Burtsev, Artyom, Metselaar, J.W., Beenakker, C.I.M. |
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| Zdroj: | In Thin Solid Films 2003 427(1):77-85 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect