Development of a numerical simulation tool to study uniformity of large area PECVD film processing
| Autor: | Sansonnens, L *, Bondkowski, J, Mousel, S, Schmitt, J.P.M, Cassagne, V |
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| Zdroj: | In Thin Solid Films 2003 427(1):21-26 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect