Preparation and characterization of amorphous GaF 3 and GaF 3–BaF 2 thin films by ECR microwave plasma-enhanced CVD
| Autor: | Takahashi, Shuhei *, Shojiya, Masanori, Kawamoto, Yoji, Konishi, Akio |
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| Zdroj: | In Thin Solid Films 2003 429(1):28-33 |
| Databáze: | ScienceDirect |
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