Properties of diamond films grown from CH 4CF 4H 2 gas mixture using the hot-filament chemical vapor deposition technique
| Autor: | Musale, D.V, Pavaskar, N.R, Kshirsagar, S.T * |
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| Zdroj: | In Thin Solid Films 2002 422(1):20-27 |
| Databáze: | ScienceDirect |
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