Nitrogen doping of polycrystalline 3C–SiC films grown by single-source chemical vapor deposition
| Autor: | Wijesundara, Muthu B.J *, Stoldt, Conrad R, Carraro, Carlo, Howe, Roger T, Maboudian, Roya |
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| Zdroj: | In Thin Solid Films 2002 419(1):69-75 |
| Databáze: | ScienceDirect |
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