Plasma deposition of amorphous carbon films from CH 4 atmospheres highly diluted in Ar
| Autor: | Jacobsohn, L.G., Capote, G., Cruz, N.C., Zanatta, A.R., Freire Jr, F.L. * |
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| Zdroj: | In Thin Solid Films 2002 419(1):46-53 |
| Databáze: | ScienceDirect |
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