Effects of annealing on the properties of Cu/low k polymer/Si structures prepared by plasma polymerization of decahydronaphthalene and tetraethylorthosilicate and Cu sputtering
| Autor: | Shim, Cheonman, Yang, Jaeyoung, Jung, Seungman, Jung, Donggeun * |
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| Zdroj: | In Thin Solid Films 2002 415(1):83-87 |
| Databáze: | ScienceDirect |
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