A comparative study on reactive and non-reactive unbalanced magnetron sputter deposition of TiN coatings
| Autor: | Mayrhofer, P.H *, Kunc, F, Musil, J, Mitterer, C |
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| Zdroj: | In Thin Solid Films 2002 415(1):151-159 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Mayrhofer, P.H *, Kunc, F, Musil, J, Mitterer, C |
|---|---|
| Zdroj: | In Thin Solid Films 2002 415(1):151-159 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect