Metal-organic chemical vapor deposition and nanoscale characterization of zirconium oxide thin films

Autor:	Harasek, S a, *, Wanzenboeck, H.D a, Basnar, B a, Smoliner, J a, Brenner, J b, Stoeri, H b, Gornik, E a, Bertagnolli, E a
Zdroj:	In Thin Solid Films 2002 414(2):199-204
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect