Modeling 3D effects of substrate topography on step coverage and film morphology of thin metal films
| Autor: | Smy, T *, Dew, S.K, Joshi, R.V |
|---|---|
| Zdroj: | In Thin Solid Films 2002 415(1):32-45 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Smy, T *, Dew, S.K, Joshi, R.V |
|---|---|
| Zdroj: | In Thin Solid Films 2002 415(1):32-45 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect