Improved fabrication process for Ru/BST/Ru capacitor by liquid source chemical vapor deposition
| Autor: | Tarutani, Masayoshi *, Yamamuka, Mikio, Takenaga, Takashi, Kuroiwa, Takeharu, Horikawa, Tsuyoshi |
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| Zdroj: | In Thin Solid Films 2002 409(1):8-14 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect