Preparation of Al-doped ZnO thin films by RF thermal plasma evaporation

Autor: Tsujino, Jiro *, Homma, Norio, Sugawara, Tomoaki, Shimono, Isao, Abe, Yoshihiko
Zdroj: In Thin Solid Films 2002 407(1):86-91
Databáze: ScienceDirect