Preparation of Al-doped ZnO thin films by RF thermal plasma evaporation
Autor: | Tsujino, Jiro *, Homma, Norio, Sugawara, Tomoaki, Shimono, Isao, Abe, Yoshihiko |
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Zdroj: | In Thin Solid Films 2002 407(1):86-91 |
Databáze: | ScienceDirect |
Externí odkaz: |
Autor: | Tsujino, Jiro *, Homma, Norio, Sugawara, Tomoaki, Shimono, Isao, Abe, Yoshihiko |
---|---|
Zdroj: | In Thin Solid Films 2002 407(1):86-91 |
Databáze: | ScienceDirect |
Externí odkaz: |