Phase composition and microstructure of polycrystalline and epitaxial TaN x layers grown on oxidized Si(001) and MgO(001) by reactive magnetron sputter deposition
| Autor: | Shin, C.-S., Kim, Y.-W., Gall, D., Greene, J.E., Petrov, I. * |
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| Zdroj: | In Thin Solid Films 2002 402(1):172-182 |
| Databáze: | ScienceDirect |
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