Gas-phase and plasma-surface reactions in radiofrequency discharges of C 2H 2–N 2–noble gas mixtures
Autor: | Durrant, Steven F, Bica de Moraes, Mario A *, Rouxinol, Francisco P |
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Zdroj: | In Thin Solid Films 2001 398:156-162 |
Databáze: | ScienceDirect |
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