The use of in situ X-ray diffraction, optical scattering and resistance analysis techniques for evaluation of copper diffusion barriers in blanket films and damascene structures
| Autor: | Cabral Jr, C *, Lavoie, C, Harper, J.M.E, Jordan-Sweet, J |
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| Zdroj: | In Thin Solid Films 2001 397(1):194-202 |
| Databáze: | ScienceDirect |
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