Amorphous hydrocarbon based thin films for high-aspect-ratio MEMS applications
| Autor: | Cao, D.M, Wang, T, Feng, B, Meng, W.J *, Kelly, K.W |
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| Zdroj: | In Thin Solid Films 2001 398:553-559 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Cao, D.M, Wang, T, Feng, B, Meng, W.J *, Kelly, K.W |
|---|---|
| Zdroj: | In Thin Solid Films 2001 398:553-559 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect