Ion beam synthesized silicides: growth, characterization and devices
Autor: | Homewood, K.P *, Reeson, K.J, Gwilliam, R.M, Kewell, A.K, Lourenço, M.A, Shao, G, Chen, Y.L, Sharpe, J.S, McKinty, C.N, Butler, T |
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Zdroj: | In Thin Solid Films 2001 381(2):188-193 |
Databáze: | ScienceDirect |
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