Optical emission spectroscopy study toward high rate growth of microcrystalline silicon
| Autor: | Fukuda, Yusuke, Sakuma, Yoshikazu, Fukai, Chisato, Fujimura, Yukihiro, Azuma, Kazufumi, Shirai, Hajime * |
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| Zdroj: | In Thin Solid Films 2001 386(2):256-260 |
| Databáze: | ScienceDirect |
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