Ultrathin μc-Si films deposited by PECVD
| Autor: | Rizzoli, R. *, Summonte, C., Plá, J., Centurioni, E., Ruani, G., Desalvo, A., Zignani, F. |
|---|---|
| Zdroj: | In Thin Solid Films 15 February 2001 383(1-2):7-10 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Rizzoli, R. *, Summonte, C., Plá, J., Centurioni, E., Ruani, G., Desalvo, A., Zignani, F. |
|---|---|
| Zdroj: | In Thin Solid Films 15 February 2001 383(1-2):7-10 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect