On the growth mechanism of a-Si:H

Autor: Kessels, W.M.M., Smets, A.H.M., Marra, D.C., Aydil, E.S., Schram, D.C., van de Sanden, M.C.M. *
Zdroj: In Thin Solid Films 15 February 2001 383(1-2):154-160
Databáze: ScienceDirect