Optical and structural properties of highly c-axis oriented aluminum nitride prepared by sputter-deposition in pure nitrogen
| Autor: | Drüsedau, Tilo P *, Bläsing, Jürgen |
|---|---|
| Zdroj: | In Thin Solid Films 2000 377:27-31 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
| Autor: | Drüsedau, Tilo P *, Bläsing, Jürgen |
|---|---|
| Zdroj: | In Thin Solid Films 2000 377:27-31 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect