Microstructure of thermal hillocks on blanket Al thin films
| Autor: | Kim, Deok-kee *, Heiland, Birgit, Nix, William D, Arzt, Eduard, Deal, Michael D, Plummer, James D |
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| Zdroj: | In Thin Solid Films 2000 371(1):278-282 |
| Databáze: | ScienceDirect |
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